There is a danger of injuring your fingers by catching them in the gap between the rotating hearth and the electron gun’s pole piece when exchanging chemicals for vapor deposition.

1.

Make sure the hearth’s rotating system has completely stopped before exchanging chemicals for vapor deposition and cleaning the vapor source.

2.

To prevent your fingers or clothing being caught in the rotating part of the hearth, keep your body away from the hearth when you press the switch to start it manually.

[Changing the control system]
It is possible to reconfigure the rotating hearth’s control system for safer operation. Please contact our sales or quality assurance division for details.

There is a report on an explosion accident occurring beside the oil-sealed rotary pump when burnable gas/flammable gas (oxygen gas) is exhausted.

There is a lot of oil mist is contained in exhausted gas from the oil-sealed rotary pump. When burnable gas is exhausted, the oil mist becomes a nucleus and explodes within the exhausted duct which is a similar phenomena as dust explosion according to our experiment and onsite verification.

You have to take proper measures for both pump and exhausted duct.

1. Measures by pump
   1. It is effective to use inert oil for operating oil (Fomblin, Halocarbon, etc.) with the oil rotation pump.
   2. Oil mist is not generated if you use a dry pump in that does not require operation oil as the oil-sealed rotary pump.
2. Measures of exhausted duct
   * If the above measures cannot be used for your pump and active oil mist may occur, you can restrict dust explosion by exhausting the explosive gas and reducing the pressure. If you use an oil mist trap, please use fireproof and nondestructive type elements. For dilution of the burnable gas/flammable gas exhausted gas, start flow nitrogen into the gas ballast valve of the oil rotation pump.　In addition, you can restrict the occurrence of static electricity, which becomes trigger of dust explosion, by using a metal exhaust duct and ground (JIS Class D), for the entire duct.

There is a report on an accident when the cryopump is stopped for some reason such as breakdown, power failure or overload that gas is exhausted from the oil rotation pump, causing an explosion at the side of the pump air.

When a cryopump stops for some reason, the temperature inside the pump rises and the absorbed hydrogen and oxygen are exhausted. If these gases are exhausted in a very short time, hydrogen is exploded.

Please be sure to execute "nitrogen installation reproduction".

There is report on an accident that the MP (Metallized Paper) condenser, which is used for relay exhaustion control type controller with an AC 200V system, exploded and a secondary disaster occurred due to degradation.

Exhaustion controllers with AC200V relay are 15-30 years old from the delivery. About 6-12 MP condensers per controller are used to maintain the relay itself. When the device is used for a long period and insulation parts are degraded, the internal pressure rises according to the increase in temperature of these condensers, then an explosion may occur.

Please be sure MP condensers with the following condensers for those who use Exhaustion controllers with an AC200V relay. If you have any question, please contact our Quality Assurance Department.


[ Condenser for replacement ]
Name: Metallized polyester film condenser
Type: MMC630K105
SHINCRON product code: 1000102950