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Load Lock Type Sputter Thin Film Deposition Equipment
With the proprietary Radical Assisted Sputtering (RAS) method, the RAS-1100C equipment deposits high quality and highly-reproducible optical thin film with no wavelength shift at low temperatures. This is a small-sized entry model that provides functional thin film including decorative thin film and nitride film.
RAS-1100C
Features
Dense optical thin film with no wavelength shift can be deposited.
The low-temperature deposition supports various applications.
Only through time control can complex optical film set with stringent specifications be deposited as specified in its film design.
Reproducible thin film with an intermediate refraction index is obtained by the mixing of material with a high refraction index and that with a low refraction index.
Functional thin film including nitride film and decorative thin film is available.
The load lock system continues to supply the stable quality of deposited film.
The equipment has an environmentally-aware design with increased deposition efficiency and is downsized for CO2 reduction.
The work burden of maintenance and cleaning is reduced dramatically from conventional vapor deposition systems.
With an area of deposited film of about 0.7m2, the coefficient of variation of the coating thickness is kept under 0.5%.
The automatic sputtering control system automates the process of sputtering.
The base drum can be detached with an easily-handled lifter.
System Configuration
Installed Baseboard Vertically-placed rotary drum
Optical Film Thickness Meter None
Crystalline Film Thickness Meter None
Computer System SSC-1
RAS Structure Sputter Source + Oxidation Reaction Source

Performance of Equipment
Evacuation Period (Film deposition room) Achieves 1×10-3Pa within 20 min. (under our measurement conditions)
Evacuation Period (Preprocess room) From atmospheric pressure to 7Pa within 5 min. (under our measurement conditions)
Achievable Vacuum Pressure 1×10-4Pa or less
Heating Temperature of Baseboard No heating
Thickness Distribution CV (Coefficient of Variance) = within 0.5% (under our delivery conditions)

Installation Requirements
Power Requirement Three-phase 200V±10% 65kW (Maximum Power)
Requirement of Coolant Approx. 100L/min. 18-24ºC (Standard: 20ºC)
Required Compressed Air 0.5MPa or more (up to 0.7MPa)
Installation Area W×D×H: 3400mm × 6200mm × 2500mm (requires 2700mm-high ceiling)
Gross Weight Approx. 5700kg

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* The product specifications may be modified for improved performance without any notice.
For details, please contact our sales division.
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