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Component
Accurate Vacuum Thin Film Deposition Equipment [ACE series]
Our ACE Series is a versatile standard series of vacuum thin film deposition equipments of high performance. You are sure to find the equipment that suits your purposes among the diverse variations in the series.
The ACE Series equipments are high precision vacuum thin film deposition equipments that produce accurate optical multi-layer thin film on glass substrates. A combination of diverse components can be used as needed to achieve the deposition of film of higher quality.
Features
By adopting a method of rotating whereby the base dome rotates around the axis (revolution) 60 times a minute, the rotation of the base dome is stable with few vibrations and particles.
The vapor source of the electron beam method (with two electron guns in 10kW) without pole pieces on the hearth deposits a stable multi-layer film.
Our proprietary ratio control method and multipoint monitor (60 points) enable the deposition of accurate and stable optical multi-layer film.
The base dome can be detached with an easily-handled lifter.
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ACE-850ACE-1150ACE-1350ACE-1500ACE-1900

System Configuration
Base Dome Spherical dome (Φ718, Φ950, Φ1200, Φ1400 or Φ1700), Taper dome, Flat plate attachments, Reversing attachments
Optical Film Thickness Meter OPM-Z1, OPM-V1, OPM-8
Crystalline Film Thickness Meter XTC/2,IC5
Computer system SDC-I
Vapor Source Electron gun system, Resistance heating system
Hearth Pot of φ35/φ40
Ion Source NIS-175, RIS, KIS, Ion-beam assistance, Ion-beam cleaning

Performance of Equipment
Evacuation Period Achieves 2×10-3Pa within 10 min. (Baseboard temperature of 300ºC)
Achievable Vacuum Pressure 5×10-5Pa or less
Heating Temperature of Baseboard 250ºC for normal use
Thickness Distribution Within 1.0% (under our delivery conditions)

Installation Conditions
ACE-1150S
Power Requirement Three-phase 200V±10% 65kW (Maximum power)
Requirement of Coolant Approx. 72L/min., 18-25ºC (Standard: 20ºC)
Required Compressed Air 0.5MPaG or higher (up to 0.7MPaG)
Installation Area W×D×H: 4900mm × 6700mm × 3095mm, requires 3400mm-high ceiling
Gross Weight Approx. 7200kg

ACE-1350S
Power Requirement Three-phase 200V±10% 70kW (Maximum power)
Requirement of Coolant Approx. 72L/min., 18-25ºC (Standard: 20ºC)
Required Compressed Air 0.5MPaG or higher (up to 0.7MPaG)
Installation Area W×D×H: 5150mm × 7000mm × 3150mm, requires 3500mm-high ceiling
Gross Weight Approx. 7600kg

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* The product specifications may be modified for improved performance without any notice.
For details, please contact our sales division.
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