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Vacuum Evaporation Equipment
BES-1300 is a vacuum thin film deposition equipment that deposits accurate optical multi-layer thin film on substrates of glass or resin. This evaporation equipment achieves high performance, high productivity and saves space with various components including a crystalline film thickness meter and intelligent controlling systems.
BES-1300
Features
This high performance equipment drastically reduces installation space by downsizing the vacuum room, the controlling system and the height of the equipment.
The SCADA (Supervisory Control and Data Acquisition) system is adopted as a system of control and data acquisition. This is an easy-to-use controlling system with good operability and maintainability.
Recipes (of materials) are designed with the optical film design tool Essential Macleod and sent via a network.
Note) Some versions of Essential Macleod are not available with BES-1300.
By adopting a method of rotating around the axis (revolution), the rotation of the base dome is stable with few vibrations and particles.
The base dome can be divided into quarters for easy detachment.
System Configuration
Base Dome Spherical dome (ƒ³1200, divided into quarters), changeable to Normal dome as an option
Optical Film Thickness Meter |
Crystalline Film Thickness Meter CRTM6000, 6-point-system rotary sensor
Controlling System SCADA
Vapor Source Electron gun system, Resistance heating system (Option)
Hearth Pot ƒ³35mm ~ 15mm ~ 20 points

Performance of Equipment
Evacuation Period Achieves 2~10-3Pa within 10 min. (Baseboard temperature of 300ºC, under cleaned and no-load condition)
Achievable Vacuum Pressure 5~10-5Pa or less (Room temperature, under cleaned and no-load condition)
Heating Temperature of Baseboard 300}10ºC (ƒ³1200, divided into quarters)
Single-layer Film Thickness Distribution ƒ’nd < }1.0% (ƒ³1200, divided into quarters, under our delivery conditions)

Installation Conditions
Power Requirement Three-phase 200V}10% (50/60Hz) 78kW (Maximum power)
Requirement of Coolant 53L/min., 18-25ºC (Standard: 20ºC)
Required Compressed Air 0.5MPaG or higher (up to 0.7MPaG)
Installation Area W~D~H: 3700mm ~ 7000mm ~ 2800mm (including maintenance area)
Gross Weigh Approx. 6000kg

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* The product specifications may be modified for improved performance without any notice.
For details, please contact our sales division.
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