SHINCRON Co.,Ltd. | Product Information [BIS-1300]

Borne out of a thorough review of all aspects of the system, BIS-1300 is a continuously improved Ion-beam Assisted Deposition (IAD) vacuum thin film deposition equipment.
The improved items include, for example, reduced evacuation period, reduced baseboard heating period, reduced film deposition time, reproducibility of film, operability, reduction of burden by putting all meters together on one screen, and a small installation area. The system also achieved a reduction of gross weight of more than 1000kg. This is an environmentally-aware and highly productive IAD vapor deposition equipment.

Load Lock Type Sputter Film Deposition Equipment BIS-1300

An embedded NIS-175 ion-beam system can expose the ion beam to the entire surface of the base drum and can achieve an ion current density of up to 100μA/cm². This allows the system to form accurate and reproducible optical thin film that requires complex optical characteristics. The deposition rate is also higher than conventional equipments.

With the separation of plasma formation process space and film deposition process space, the system achieved high stability and reproducibility in film deposition.

Absorption of optical film with impurities decreased with the adoption of the NIS-175 ion-beam system that has a structure to prevent contaminants from mixing into film.

By adopting a method of rotating whereby the base dome rotates around the axis (revolution) 60 times a minute, the rotation of the base dome is stable with few vibrations and particles.

Recipes (of materials) are designed with the optical film design tool Essential Macleod and sent via a network.
Note) Some versions of Essential Macleod are not available with BIS-1300.

The improved optical film thickness metric system (OPM-Z1) and multipoint monitor (80 points) enable deposition of accurate and stable optical multilayer film.

The base dome can be detached with an easily-handled lifter.

The SCADA (Supervisory Control and Data Acquisition System)/HMI (Human Machine Interface) system are adopted as a controlling system. This is an easy-to-use system containing various components including data collection, processing, control, alarm, graphics, report, scheduler, recipes and trending

*) SCADA refers to a system to control and monitor measurement, and the tools to establish this function in a PC are called SCADA software. These tools are used as software to control and monitor PLC.


Base Dome	Spherical dome (Φ1200)
Optical Film Thickness Meter	OPM-Z1
Crystalline Film Thickness Meter	XTC/3S
Controlling System	SCADA/HMI
Vapor Source	Electron Gun (Selective item), Resistance Heating (Option)
Hearth	20-point pot or annular hearth, or 30-point pot
Ion Source	NIS-175


Evacuation Period	To 2×10-³Pa within 10 min. (Baseboard temperature of 250ºC, cleaned and no-load condition)
Achievable Vacuum Pressure	5×10-⁵Pa or less (Room temperature, cleaned and no-load condition)
Temperature distribution of baseboard	250±10ºC
Film thickness distribution of a single layer	Δnd < ±1.0% (Φ1200, under our delivery basis)


Power Requirement	Three-phase 200V±10% (50/60Hz) 85kW (Maximum power)
Requirement of Coolant	Approx. 70L/min., 18-25ºC (Standard: 20ºC)
Required Compressed Air	0.5MPaG or higher (up to 0.7MPaG)
Installation Area	W×D×H: 3700mm × 7000mm × 2800mm (including maintenance space)
Gross Weight	Approx. 6500kg

* The product specifications may be modified for improved performance without any notice.
For details, please contact our sales division.