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This is a series of sputter equipment that incorporates state-of-the-art film deposition technologies, addressing a wide range of needs in the applications of film deposition.
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Film thickness can be accurately controlled with the optical film thickness meter OPM and the computer system for film deposition.
All types of base, including flat plate and dome, are supported. This equipment can be applied to a broad range of applications.
A superb line up of components is available, such as an ion-beam cleaning system.
The vacuum chamber adopts a front-door system, making easy the exchange of baseboards and the maintenance of the vacuum chamber.
The system also provides the feature of 2-dimensional simultaneous formation and bias sputtering with a rotating baseboard.
Suitable for a variety of experiments and researches.
Suitable for researches and small-scale production.
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| Target |
Round Target |
| Deposition Method |
Sputter UP method |
| Base Dome |
Revolutionary attachment of flat shape or round shape |
| Cleaning |
Ion-beam cleaning |
| Computer System |
SPC-8000 |
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| Evacuation Period |
Achieves 10-4Pa within 10 min. |
| Achievable Pressure |
Around 10-5Pa |
| Baseboard Heating Temperature |
300ºC in normal use |
| Performance |
BMS-650 |
BMS-800 |
| Number of mounted baseboards |
Φ3” |
25 |
30 |
| Thickness Distribution *1 |
±5% |
Within 50mm
(Φ3”, 15 boards) |
Within 500mm
(Φ3” , 25 boards) |
| ±10% |
Within 500mm
(Φ3”, 25 boards) |
Within 580mm
(Φ3”, 30 boards) |
| Main Performance |
Achievable Pressure |
Around 10-5Pa |
| Evacuation Period to 10-4Pa |
Within 10 min. |
| Baseboard Heating Temperature |
300ºC in normal use |
| Rate of Film Deposition *2 |
Fixed |
Al: 6000Å/min SiO2: 1000Å/min |
| Rotated |
Al: 300Å/min SiO2: 50Å/min |
*1: When using a base dome. The values 450mm and 500mm indicate the length of curved surface.
*2: In a fixed environment, the distance between a baseboard and a target is 60mm; consumes DC 2kW power in Al deposition, 1kW in SiO2. When rotated, a base dome is used and argon gas is introduced.
| BMS-650 |
| Power Requirements |
Three-phase 200V±10% Approx. 25kW (Maximum Power) |
| Required Coolant |
Approx. 40L/min. 18-25ºC (Standard: 20ºC) |
| Required Compressed Air |
0.5MPaG or more (up to 0.7MPaG) |
| Installation Area |
W×D×H: 3400mm × 4000mm × 2200mm (requires 3000mm-high ceiling) |
| Gross Weight |
Approx. 2000kg |
| BMS-800 |
| Power Requirements |
Three-phase 200V±10% Approx. 27kW (Maximum Power) |
| Requirement of Coolant |
Approx. 80L/min. 18-25ºC (Standard: 20ºC) |
| Required Compressed Air |
0.5MPaG or more (up to 0.7MPaG) |
| Installation Area |
W×D×H: 3600mm × 3900mm × 2000mm (requires 2500mm-high ceiling) |
| Gross Weight |
Approx. 4000kg |
* The product specifications may be modified for improved performance without any notice.
For details, please contact our sales division.
