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BSC Series consists of auto sputters with high sputter technologies and high productivity that deposit multiple layers of SiO2 and ITO on glass filters and glass substrates.
The series has a wide range of product types that address the needs of everything from small to mass production.
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This system adopts intermittent deposition with rotation sputter. This enables the achievement of higher film characteristics than those in the through deposition with an in-line sputter.
This system incorporates the new sputter cathode for ITO film deposition - developed for achieving long-term and stable sputter deposition of low-resistance ITO film. This new component allows for the two-fold improvement of the efficiency of target from traditional high magnetic-energy cathodes. Thus it contributes to achieving a large cost reduction in ITO film deposition.
A side sputter method associated with the rotation of the drum, where the target and baseboard are vertically situated, makes the maintenance of the system easy.
Various technologies including measures for pinholes and maintenance are embedded into the internal components of the system.
The series includes the following three types:
This type can integrate up to three targets of 5"×20" in size. It is a medium-size sputter for production that combines mobility with operability. It is able to process up to six boards of 300×300 in size for one batch.
Ranked between BSC-700 and BSC-1900. Suitable for middle-range volume production.
Incorporates a large rotary drum. This is a large sputter that can process an extremely large number of boards each period. This type has the ability to simultaneously process the largest number of boards in its class (up to 48 in one batch).
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| Base Drum |
Drum (Φ630×H330, Φ900×H760, Φ1700×H1420)
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| Computer System |
SPC-8000 |
| Deposition Method |
Side sputter method with DC/RF magnetron |
| Target |
Square sputter source (with a wide erosion system) |
| Performance |
BSC-700 |
BSC-1000T |
BSC-1900 |
| Number of Mounted Boards |
100mm×100mm |
68 |
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- |
| 300mm×400mm |
6 |
16 |
48 |
| 370mm×470mm |
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- |
26 |
| 400mm×500mm |
- |
- |
24 |
| BSC-700 |
| Power Requirements |
Approx. 50kW (Maximum Power) |
| Required Coolant |
Approx. 30L/min. |
| Required Compressed Air |
0.5MPaG or more (up to 0.7MPaG) |
| Installation Area |
W×D×H: 3500mm × 3600mm × 2350mm |
| Gross Weight |
Approx. 2200kg |
| BSC-1000T |
| Power Requirements |
Approx. 90kW (Maximum Power) |
| Required Coolant |
Approx. 72L/min. |
| Required Compressed Air |
0.5MPaG or more (up to 0.7MPaG) |
| Installation Area |
W×D×H: 3500mm × 5500mm × 3000mm |
| Gross Weight |
Approx. 5600kg |
| BSC-1900 |
| Power Requirements |
Approx. 150kW (Maximum Power) |
| Required Coolant |
Approx. 250L/min. |
| Required Compressed Air |
0.5MPaG or more (up to 0.7MPaG) |
| Installation Area |
W×D×H: 6200mm × 6200mm × 6500mm |
| Gross Weight |
Approx. 24000kg |
* The product specifications may be modified for improved performance without any notice.
For details, please contact our sales division.
