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Vacuum Thin Film Serial Deposition Equipment
CES is a series of vacuum thin film serial deposition equipment that can deposit high-quality and highly-reproducible optical film.
By attaching diverse components that incorporate various technologies, film deposition becomes possible for any application.
We have a variety of equipment lined up to meet each customer's needs.
With over 500 units sold, we proudly recommend this superior series.
Features
Designed to accommodate around-the-clock operation, continuous operation is possible.
The thickness of the optical film can be controlled with the optical film thickness monitor. Our proprietary ratio control method enables the deposition of accurate and stable film.
The optical film thickness is controlled with an optical type film thickness monitor. High precision products can be supplied consistently using our unique ratio control method.
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CES Series includes the following three types of equipment:

CES-3M-1100/1350/2000
Available in a clean-room. It can be easily connected with a robot that runs the putting on and removing of baseboards and with a washing preprocess machine since it has only the one gateway for baseboards. A type that can operate large baseboards (300×300mm) is also available.

CES-3S-800/1050C
One of our best-sellers, this equipment is known for the antireflection coating of plastic lens glasses. It can also be applied as thin film deposition equipment for the antireflection coating of liquid crystal panels.

CES-3D-800/1100/1350/1500
Suitable for small batches of varied products since the equipment permits separate heating conditions for each chamber including "a chamber through which to exchange an object between two chambers." It can also be applied to the heating of vapor deposition on various glass lenses.

System Configuration
Base Dome Spherical Dome (Φ650, Φ720, Φ950, Φ1200, Φ1400 and Φ1850), Taper Dome, Flat plate attachments and Reversing attachments
Optical Film Thickness Meter OPM-V1, OPM-8
Crystalline Film Thickness Meter
(Option)
XTC/3, IC/5
Computer System SDC-1
Vapor Source Electron gun system, Resistance heating system
Hearth Granular hearth, Tablet hearth
Ion Source NIS, RIS, KIS, Ion-beam assist, Ion-beam cleaning
System for auto-delivery of materials
System for water-repellent finishing

Performance of Equipment
The CES series has the following advantages compared to the batch type evaporation coaters.

Serial Batch
Conducting Time*1 3 Domes/hr. 1 Dome/hr.
Maintenance Cycle*2 Once approx. every 48 hours once approx. every one hour
Pinhole (Contamination) Incidence*3 1 3 - 5
Incidence of Bad Spectral Characteristics*4 Within 1.0% 3.0% or more
*1: In the case where a plastic board is used, heating temperature is 70ºC and film deposition takes 15 minutes.
*2: Maintenance consists of the removal of particles adhering to the vapor deposition chamber during opening to the atmosphere and the resupply of samples.
*3: The incidence in serial type is set to 1 when the same maintenance is operated for both types.
*4: Incidence of bad spectral characteristics of five-layer W-type AR (antireflection) film for plastic glasses (Standard: Wavelength with W as an origin: 510±10nm).
Comparison made to our batch deposition type. These figures depend on specifications.
Installation Requirements
CES-3S-1050
Power Requirements Three-phase 200V±10% Approx. 90kW (Maximum Power)
Required Coolant Approx. 170L/min. 18-25ºC (Standard: 20ºC)
Required Compressed Air 0.5MPaG or more (up to 0.7MPaG)
Installation Area WxDxH: 7000mm × 6500mm × 3850mm (requires 4150mm-high ceiling)
Gross Weight Approx. 11000kg

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* The product specifications may be modified for improved performance without any notice.
For details, please contact our sales division.
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