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CES is a series of vacuum thin film serial deposition equipment that can deposit high-quality and highly-reproducible optical film.
By attaching diverse components that incorporate various technologies, film deposition becomes possible for any application.
We have a variety of equipment lined up to meet each customer's needs.
With over 500 units sold, we proudly recommend this superior series.
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Designed to accommodate around-the-clock operation, continuous operation is possible.
The thickness of the optical film can be controlled with the optical film thickness monitor. Our proprietary ratio control method enables the deposition of accurate and stable film.
The optical film thickness is controlled with an optical type film thickness monitor. High precision products can be supplied consistently using our unique ratio control method.
CES Series includes the following three types of equipment:

Available in a clean-room. It can be easily connected with a robot that runs the putting on and removing of baseboards and with a washing preprocess machine since it has only the one gateway for baseboards. A type that can operate large baseboards (300×300mm) is also available.

One of our best-sellers, this equipment is known for the antireflection coating of plastic lens glasses. It can also be applied as thin film deposition equipment for the antireflection coating of liquid crystal panels.

Suitable for small batches of varied products since the equipment permits separate heating conditions for each chamber including "a chamber through which to exchange an object between two chambers." It can also be applied to the heating of vapor deposition on various glass lenses.
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| Base Dome |
Spherical Dome (Φ650, Φ720, Φ950, Φ1200, Φ1400 and Φ1850), Taper Dome, Flat plate attachments and Reversing attachments |
| Optical Film Thickness Meter |
OPM-V1, OPM-8 |
Crystalline Film Thickness Meter
(Option) |
XTC/3, IC/5
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| Computer System |
SDC-1 |
| Vapor Source |
Electron gun system, Resistance heating system |
| Hearth |
Granular hearth, Tablet hearth |
| Ion Source |
NIS, RIS, KIS, Ion-beam assist, Ion-beam cleaning |
| System for auto-delivery of materials |
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| System for water-repellent finishing |
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The CES series has the following advantages compared to the batch type evaporation coaters.
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Serial |
Batch |
| Conducting Time*1 |
3 Domes/hr. |
1 Dome/hr. |
| Maintenance Cycle*2 |
Once approx. every 48 hours |
once approx. every one hour |
| Pinhole (Contamination) Incidence*3 |
1 |
3 - 5 |
| Incidence of Bad Spectral Characteristics*4 |
Within 1.0% |
3.0% or more |
*1: In the case where a plastic board is used, heating temperature is 70ºC and film deposition takes 15 minutes.
*2: Maintenance consists of the removal of particles adhering to the vapor deposition chamber during opening to the atmosphere and the resupply of samples.
*3: The incidence in serial type is set to 1 when the same maintenance is operated for both types.
*4: Incidence of bad spectral characteristics of five-layer W-type AR (antireflection) film for plastic glasses (Standard: Wavelength with W as an origin: 510±10nm).
Comparison made to our batch deposition type. These figures depend on specifications.
| CES-3S-1050 |
| Power Requirements |
Three-phase 200V±10% Approx. 90kW (Maximum Power) |
| Required Coolant |
Approx. 170L/min. 18-25ºC (Standard: 20ºC) |
| Required Compressed Air |
0.5MPaG or more (up to 0.7MPaG) |
| Installation Area |
WxDxH: 7000mm × 6500mm × 3850mm (requires 4150mm-high ceiling) |
| Gross Weight |
Approx. 11000kg |
* The product specifications may be modified for improved performance without any notice.
For details, please contact our sales division.