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Computer System for Film Deposition

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Information about used equipment
We have a large line up of various components enabling a higher production environment.
HD Series
Shincron's proprietary high-performance oil diffusion pumps are smaller than traditional cylinder pumps and consume less power (60-70% of that of traditional ones). They are easy to maintain due to characteristics including less amount of oil return, an oil drain exit, an oil charge exit, an oil gauge and wheels.


TMH Series
The cryopumps condense, absorb and then exhaust gas molecules projected into the Chevron baffle or the cryoarray refrigerated to a very low temperature. What they can condense and exhaust includes vapor, oxygen, nitrogen and argon gas. With their high ability to exhaust vapor, they can provide stable productivity even for high water-absorbing materials such as plastic baseboards. Automated operation in large production equipment is also supported


MTR Series
These evacuation units sterically converge an oil-sealed rotary pump with a mechanical booster pump, which were previously placed separately. They achieve simultaneous rotation from atmospheric pressure with a motor making them capable of rapid evacuation. They also reduce power dissipation and installation space.


FC-2D FC-3B
These equipment automatically exchange interference filters in an optoelectric thickness meter with a one-push button. Up to 6 filters can be installed on FC-2D, while FC-3B can handle 12 filters, at the same time. This drastically reduces the burden of exchanging. They can also be applied to auto vapor deposition equipment since they have a remote control switch.


MFC System Massflow controller
These equipment introduce a controlled volume of gas to a vacuum chamber. They support automated control due to their remote-control component. The soft-start circuit incorporated in them avoids overshoot.


HL-14 Halogen lamp heater
Small heaters incorporated in the vacuum equipment. The high thermal efficiency of a halogen heater combined with the high resistance to acids of the ceramic reflector achieves a quick and even increase of temperature. Also, the temperature can be stabilized with an SCR control system.


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* The product specifications may be modified for improved performance without any notice.
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