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Computer System for Film Deposition

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Vacuum Thin Film Serial Deposition Equipment
eCES has been developed for the purpose of serially depositing antireflection coating on plastic plates. We have fulfilled the needs of gEcology & Economyh by limiting the applications of multipurpose CES Series equipment.
This system is vacuum thin film serial deposition equipment which incorporates Shincron's intensive experience and expertise for the improvement of productivity and operability.
To make it easier to use, we have lessened the burden of base dome exchange and maintenance has also been reduced.
Features
Designed for depositing six-layer AR film in 120 batches. A large endless hearth is used as the deposition chamber. A variety of samples can be separated at any point by diaphragms.
Since the system eliminates the need to expose the chamber to the atmosphere at each time of deposition, stable continuous production is possible under uniform cycle operation.
The thickness of the optical film is controlled with the optical film thickness monitor. Our proprietary ratio control method enables the deposition of accurate and stable film.
The base dome turns fast in a stable condition with the center-axis rotation system. This reduces vibrations and particles.
An ion gun is available as an option.
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eCES-3S-1100 Limited model

System Configuration
Base Dome Spherical Dome, Φ950
Optical Film Thickness Meter OPM-8
Crystalline Film Thickness Meter XTC/2, IC5
Computer System SDC-1
Vapor Source Electron gun system
Hearth Endless hearth (partitioned when used)
Ion Source RIS, Ion-beam assist, Ion-beam cleaning

Performance of Equipment
Evacuation Period Achieves 2×10-3Pa within 30 sec. (time after the dome is moved to the deposition chamber and the gate valve is closed)
Achievable Vacuum Pressure 3×10-5Pa or less
Heating Temperature of Baseboard 70ºC in normal use
Film Thickness Distribution, Deposition Test Within Δnd < ±1.0% (under our delivery basis)

Installation Requirements
Power Requirements Three-phase 200V±10% 50Hz Approx. 70kW (Maximum Power)
Required Coolant Approx. 75L/min. 18-25ºC (Standard: 20ºC)
Required Compressed Air 0.5MPaG or more (up to 0.7MPaG)
Installation Area WxDxH: 8000mm × 6000mm × 2350mm (requires 2500mm-high ceiling)
Gross Weight Approx. 8600kg

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* The product specifications may be modified for improved performance without any notice.
For details, please contact our sales division.
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