Useful for thickness measurement and thickness control of film being deposited. Wavelengths between ultraviolet and near-infrared, ranging from 380nm to 1100nm.
Adopting a way that uses grating, the equipment is able to extract any wavelength in 1nm segments.
Adopting a high resolution A/D converter and 16-bit computer, the equipment achieves high performance with a command accuracy of ±0.01%.
Remote-controllable via GP-IB or RS-232C.