Provides film that has an optical and electric performance close to those of bulk.
Can mass-produce aluminum alloy film of stable quality.
Load lock method achieves stable deposition condition.
Due to its small-scale and box-shape, it can easily be installed in a clean room.
Smaller operation board with a touch screen.
Baseboard Transport System (frog-leg type) with an inverter enables smooth and accurate transport.
A simple system makes maintenance work easy - there is a door-valve separator between the deposition chamber and the subsidiary chamber.
* The product specifications may be modified for improved performance without any notice.
For details, please contact our sales division.
