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Product Information

High-Performance Sputter BMS series

This is a series of sputter equipment that incorporates state-of-the-art film deposition technologies, addressing a wide range of needs in the applications of film deposition.

Features

LINE UP

System Configuration

Target Round Target
Deposition Method Sputter UP method
Base Dome Revolutionary attachment of flat shape or round shape
Cleaning Ion-beam cleaning
Computer System SPC-8000

Performance of Equipment

Evacuation Period Achieves 10-4Pa within 10 min.
Achievable Pressure Around 10-5Pa
Baseboard Heating Temperature 300ºC in normal use
Performance BMS-650 BMS-800
Number of mounted baseboards Φ3" 25 30
Thickness Distribution *1 ±5% Within 50mm
(Φ3”, 15 boards)
Within 500mm
(Φ3” , 25 boards)
±10% Within 500mm
(Φ3”, 25 boards)
Within 580mm
(Φ3”, 30 boards)
Main Performance Achievable Pressure Around 10-5Pa
Evacuation Period to 10-4Pa Within 10 min.
Baseboard Heating Temperature 300ºC in normal use
Rate of Film Deposition *2 Fixed Al:6000Å/min SiO2:1000Å/min
Rotated Al:300Å/min SiO2:50Å/min
*1: When using a base dome. The values 450mm and 500mm indicate the length of curved surface.
*2: In a fixed environment, the distance between a baseboard and a target is 60mm; consumes DC 2kW power in Al deposition, 1kW in SiO2. When rotated, a base dome is used and argon gas is introduced.

Installation Requirements

BMS-650
Power Requirements Three-phase 200V±10% Approx. 25kW (Maximum Power)
Required Coolant Approx. 40L/min. 18-25ºC (Standard: 20ºC)
Required Compressed Air 0.5MPaG or more (up to 0.7MPaG)
Installation Area W×D×H: 3400mm × 4000mm × 2200mm (requires 3000mm-high ceiling)
Gross Weight Approx. 2000kg
BMS-800
Power Requirements Three-phase 200V±10% Approx. 27kW (Maximum Power)
Requirement of Coolant Approx. 80L/min. 18-25ºC (Standard: 20ºC)
Required Compressed Air 0.5MPaG or more (up to 0.7MPaG)
Installation Area W×D×H: 3600mm × 3900mm × 2000mm (requires 2500mm-high ceiling)
Gross Weight Approx. 4000kg

inquiries about BMS series

* The product specifications may be modified for improved performance without any notice.
For details, please contact our sales division.