High-Performance Sputter BMS series
This is a series of sputter equipment that incorporates state-of-the-art film deposition technologies, addressing a wide range of needs in the applications of film deposition.
Features
- Film thickness can be accurately controlled with the optical film thickness meter OPM and the computer system for film deposition.
- All types of base, including flat plate and dome, are supported. This equipment can be applied to a broad range of applications.
- A superb line up of components is available, such as an ion-beam cleaning system.
- The vacuum chamber adopts a front-door system, making easy the exchange of baseboards and the maintenance of the vacuum chamber.
- The system also provides the feature of 2-dimensional simultaneous formation and bias sputtering with a rotating baseboard.
LINE UP
- BMS-650
Suitable for a variety of experiments and researches. - BMS-800
Suitable for researches and small-scale production.
System Configuration
| Target | Round Target |
|---|---|
| Deposition Method | Sputter UP method |
| Base Dome | Revolutionary attachment of flat shape or round shape |
| Cleaning | Ion-beam cleaning |
| Computer System | SPC-8000 |
Performance of Equipment
| Evacuation Period | Achieves 10-4Pa within 10 min. |
|---|---|
| Achievable Pressure | Around 10-5Pa |
| Baseboard Heating Temperature | 300ºC in normal use |
| Performance | BMS-650 | BMS-800 | |
|---|---|---|---|
| Number of mounted baseboards | Φ3" | 25 | 30 |
| Thickness Distribution *1 | ±5％ | Within 50mm (Φ3”, 15 boards) |
Within 500mm (Φ3” , 25 boards) |
| ±10％ | Within 500mm (Φ3”, 25 boards) |
Within 580mm (Φ3”, 30 boards) |
|
| Main Performance | Achievable Pressure | Around 10-5Pa | |
| Evacuation Period to 10-4Pa | Within 10 min. | ||
| Baseboard Heating Temperature | 300ºC in normal use | ||
| Rate of Film Deposition *2 | Fixed | Al：6000Å/min SiO2：1000Å/min | |
| Rotated | Al：300Å/min SiO2：50Å/min | ||
*1: When using a base dome. The values 450mm and 500mm indicate the length of curved surface.
*2: In a fixed environment, the distance between a baseboard and a target is 60mm; consumes DC 2kW power in Al deposition, 1kW in SiO2. When rotated, a base dome is used and argon gas is introduced.
*2: In a fixed environment, the distance between a baseboard and a target is 60mm; consumes DC 2kW power in Al deposition, 1kW in SiO2. When rotated, a base dome is used and argon gas is introduced.
Installation Requirements
| BMS-650 | |
|---|---|
| Power Requirements | Three-phase 200V±10% Approx. 25kW (Maximum Power) |
| Required Coolant | Approx. 40L/min. 18-25ºC (Standard: 20ºC) |
| Required Compressed Air | 0.5MPaG or more (up to 0.7MPaG) |
| Installation Area | W×D×H: 3400mm × 4000mm × 2200mm (requires 3000mm-high ceiling) |
| Gross Weight | Approx. 2000kg |
| BMS-800 | |
|---|---|
| Power Requirements | Three-phase 200V±10% Approx. 27kW (Maximum Power) |
| Requirement of Coolant | Approx. 80L/min. 18-25ºC (Standard: 20ºC) |
| Required Compressed Air | 0.5MPaG or more (up to 0.7MPaG) |
| Installation Area | W×D×H: 3600mm × 3900mm × 2000mm (requires 2500mm-high ceiling) |
| Gross Weight | Approx. 4000kg |
* The product specifications may be modified for improved performance without any notice.
For details, please contact our sales division.
