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Product Information

High-Performance Sputter BSC series

BSC Series consists of auto sputters with high sputter technologies and high productivity that deposit multiple layers of SiO2 and ITO on glass filters and glass substrates. The series has a wide range of product types that address the needs of everything from small to mass production.

Features

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The series includes the following three types:

System Configuration

Base Drum Drum (Φ630×H330, Φ900×H760, Φ1700×H1420)
Computer System SPC-8000
Deposition Method Side sputter method with DC/RF magnetron
Target Square sputter source (with a wide erosion system)

Performance of Equipment

Performance BSC-700 BSC-1000T BSC-1900
Number of Mounted Boards 100mm×100mm 68 pcs - -
300mm×400mm 6 16 48
370mm×470mm - - 26
400mm×500mm - - 24

Installation Requirements

BSC-700
Power Requirements Approx. 50kW (Maximum Power)
Required Coolant Approx. 30L/min.
Required Compressed Air 0.5MPaG or more (up to 0.7MPaG)
Installation Area W×D×H: 3500mm × 3600mm × 2350mm
Gross Weight Approx. 2200kg
BSC-1000T
Power Requirements Approx. 90kW (Maximum Power)
Required Coolant Approx. 72L/min.
Required Compressed Air 0.5MPaG or more (up to 0.7MPaG)
Installation Area W×D×H: 3500mm × 5500mm × 3000mm
Gross Weight Approx. 5600kg
BSC-1900
Power Requirements Approx. 150kW (Maximum Power)
Required Coolant Approx. 250L/min.
Required Compressed Air 0.5MPaG or more (up to 0.7MPaG)
Installation Area W×D×H: 6200mm × 6200mm × 6500mm
Gross Weight Approx. 24000kg

inquiries about BSC series

* The product specifications may be modified for improved performance without any notice.
For details, please contact our sales division.