High-Performance Sputter BSC series

BSC Series consists of auto sputters with high sputter technologies and high productivity that deposit multiple layers of SiO₂ and ITO on glass filters and glass substrates. The series has a wide range of product types that address the needs of everything from small to mass production.

Features

• This system adopts intermittent deposition with rotation sputter. This enables the achievement of higher film characteristics than those in the through deposition with an in-line sputter.
• This system incorporates the new sputter cathode for ITO film deposition - developed for achieving long-term and stable sputter deposition of low-resistance ITO film. This new component allows for the two-fold improvement of the efficiency of target from traditional high magnetic-energy cathodes. Thus it contributes to achieving a large cost reduction in ITO film deposition.
• A side sputter method associated with the rotation of the drum, where the target and baseboard are vertically situated, makes the maintenance of the system easy.
• Various technologies including measures for pinholes and maintenance are embedded into the internal components of the system.

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The series includes the following three types:

• BSC-700
  This type can integrate up to three targets of 5"×20" in size. It is a medium-size sputter for production that combines mobility with operability. It is able to process up to six boards of 300×300 in size for one batch.
• BSC-1000T
  Ranked between BSC-700 and BSC-1900. Suitable for middle-range volume production.
• BSC-1900
  Incorporates a large rotary drum. This is a large sputter that can process an extremely large number of boards each period. This type has the ability to simultaneously process the largest number of boards in its class (up to 48 in one batch).

System Configuration

Base Drum	Drum (Φ630×H330, Φ900×H760, Φ1700×H1420)
Computer System	SPC-8000
Deposition Method	Side sputter method with DC/RF magnetron
Target	Square sputter source (with a wide erosion system)

Performance of Equipment

Performance		BSC-700	BSC-1000T	BSC-1900
Number of Mounted Boards	100mm×100mm	68 pcs	-	-
	300mm×400mm	6	16	48
	370mm×470mm	-	-	26
	400mm×500mm	-	-	24

Installation Requirements

BSC-700
Power Requirements	Approx. 50kW (Maximum Power)
Required Coolant	Approx. 30L/min.
Required Compressed Air	0.5MPaG or more (up to 0.7MPaG)
Installation Area	W×D×H: 3500mm × 3600mm × 2350mm
Gross Weight	Approx. 2200kg

BSC-1000T
Power Requirements	Approx. 90kW (Maximum Power)
Required Coolant	Approx. 72L/min.
Required Compressed Air	0.5MPaG or more (up to 0.7MPaG)
Installation Area	W×D×H: 3500mm × 5500mm × 3000mm
Gross Weight	Approx. 5600kg

BSC-1900
Power Requirements	Approx. 150kW (Maximum Power)
Required Coolant	Approx. 250L/min.
Required Compressed Air	0.5MPaG or more (up to 0.7MPaG)
Installation Area	W×D×H: 6200mm × 6200mm × 6500mm
Gross Weight	Approx. 24000kg

inquiries about BSC series

* The product specifications may be modified for improved performance without any notice.
For details, please contact our sales division.