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Product Information

Load Lock Type High-Performance metal Thin Film Deposition Equipment PMC series

PMC Series consists of equipment that provide dramatically stabilized film for use in SAW filter.
This provides extremely high quality film of Aluminum (Al-Cu alloy).

Features

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System Configuration

Base Dome Flat (Φ 570)
Thickness Controller Crystalline Film Thickness Meter
Computer System Dedicated controlling system (system to send deposition data is supported)
Vapor Source Electron gun
Hearth Large Pot
Ion Source Ion-beam cleaning using ion bombardment

Performance of Equipment

Evacuation Period Achieves 5 × 10-5Pa within 15 min. (at room temperature)
Achievable Vacuum Pressure 9 × 10-6Pa or less
Heating Temperature of Baseboard 70ºC in normal use
Film Thickness Distribution For consultation

Installation Requirements

PMC-600
Power Requirements Three-phase 200V±10% 35kW (Maximum Power)
Required Coolant Approx. 35L/min. 18-25ºC (Standard: 20ºC)
Required Compressed Air 0.5MPaG or more (up to 0.7MPaG)
Installation Area W×D×H: 3000mm × 3800mm × 2500mm (requires 2800mm-high ceiling)
Gross Weight Approx. 2250kg
PMC-800
Power Requirements Three-phase 200V±10% 47kW (Maximum Power)
Required Coolant Approx. 35L/min. 18-25ºC (Standard: 20ºC)
Required Compressed Air 0.5MPaG or more (up to 0.7MPaG)
Installation Area W×D×H: 4300mm × 3800mm × 2500mm (requires 2800mm-high ceiling)
Gross Weight Approx. 4000kg

inquiries about PMC series

* The product specifications may be modified for improved performance without any notice.
For details, please contact our sales division.