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Technical Information
- 1. Introduction
- 2. History of thin film deposition using vacuum
- 3. Basics of vacuum
- 4. Plasma
- 5. Various film deposition technologies based on the Physical Vapor Deposition (PVD) method
- 6. Actual PVD systems
- 7. Various film deposition technologies and systems based on the Chemical Vapor Deposition (CVD) method
- 8. Thin films created using vacuum
- 9. Examples and applications of films formed with Shincron’s film forming systems
- 10. Points for thin film deposition
- 11. Maintenance of thin film deposition systems
- 12. Conclusion
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