Batch type deposition system for resins

Best for film deposition on resin lenses for digital cameras, smartphones, and so on

Application:
Optics

Features

  1. Using a split dome enables films on a large number of lenses to be formed at a time
  2. Employs not only an optimum substrate heating method for low-temperature film formation, but also a measure for reducing the influence of moisture released from plastics is taken

Specification outline

Model ARC-900 ARC-1350 ARC-1650 ARC-1900
Substrate dome ⌀ 800 mm ⌀ 1,200 mm ⌀ 1,500 mm ⌀ 1,700 mm
Film thickness gauge Optical film thickness gauge and quartz type film thickness gauge (Six-point rotary sensor)
Evaporation source EB x 1
Assistance RF ion source
Exhaust system Roughing unit, turbo-molecular pump, and Meissner trap
Option Reversal mechanism, planetary rotation mechanism, and rotary and revolutionary mechanism
Contact
We propose systems that meet
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and applications.
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* Product specifications are subject to change for performance improvement without prior notice. For details, please contact our sales representatives.