Batch type deposition system for resins
Best for film deposition on resin lenses for digital cameras, smartphones, and so on
- Application:
- Optics
Features
- Using a split dome enables films on a large number of lenses to be formed at a time
- Employs not only an optimum substrate heating method for low-temperature film formation, but also a measure for reducing the influence of moisture released from plastics is taken
Specification outline
Model | ARC-900 | ARC-1350 | ARC-1650 | ARC-1900 |
---|---|---|---|---|
Substrate dome | ⌀ 800 mm | ⌀ 1,200 mm | ⌀ 1,500 mm | ⌀ 1,700 mm |
Film thickness gauge | Optical film thickness gauge and quartz type film thickness gauge (Six-point rotary sensor) | |||
Evaporation source | EB x 1 | |||
Assistance | RF ion source | |||
Exhaust system | Roughing unit, turbo-molecular pump, and Meissner trap | |||
Option | Reversal mechanism, planetary rotation mechanism, and rotary and revolutionary mechanism |
Contact
We propose systems that meet
your requirements for functions
and applications.
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your requirements for functions
and applications.
Please feel free to contact us.
Sales Department
* Product specifications are subject to change for performance improvement without prior notice. For details, please contact our sales representatives.