Sputtering system for mold release films
Suitable for research and development as well as small-scale production
Features
- Employable in a wide range of applications such as metallic and dielectric thin films
- Also suitable for research and development applications because it can be installed compactly
Specification outline
| Model | BMS-650 | BMS-800 |
|---|---|---|
| Substrate dome | Planar and dome-shaped revolution jigs | |
| Sputtering source | Round target | |
| Cleaning | Ion beam cleaning | |
| Exhaust system | Roughing unit, cryopump | |
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your requirements for functions
and applications.
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your requirements for functions
and applications.
Please feel free to contact us.
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* Product specifications are subject to change for performance improvement without prior notice. For details, please contact our sales representatives.