Sputtering system for transparent and metallic electrodes
Used for deposition of various types of electrode films
- Application:
- Electron and electricity control
Features
- Enables the deposition of low-resistance electrode films
- Enables the deposition of multi-layers of dielectrics and metals
Specification outline
| Model | BSC-700 | BSC-1000 | BSC-1900 |
|---|---|---|---|
| Drum size | ⌀ 630 mm×H 330 mm | ⌀ 900 mm×H 760 mm | ⌀ 1,700 mm×H 1,420 mm |
| Sputtering source | 5” x 27” x 1 | 5” x 42” x 2 | 5” x 65” x 4 |
| Exhaust system | Roughing unit / cryopump / turbo-molecular pump | ||
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* Product specifications are subject to change for performance improvement without prior notice. For details, please contact our sales representatives.