Continuous deposition system
A long-selling system with superior stability and mass productivity
- Application:
- Optics
This system enables the film forming process chamber to be kept under high vacuum constantly, without exposing the deposition chamber to atmosphere every time a film is formed.
Therefore, optical thin films with a stable refractive index and high quality can be produced with high reproducibility.
We offer a diverse lineup of systems including Type M systems applicable to clean rooms and Type D systems applicable to multiproduct production.
Features
- Enables the forming of films with stable refractive index and high quality, because the deposition chamber is kept under vacuum
- Achieves superior productivity, because the film formation, exhaustion, heating, and leaking processes are performed in separate chambers simultaneously
- Enables continuous formation of a wide variety of films, because of compatibility with various chemicals as well as a material feeding mechanism
- Achieves manpower reduction because of automated processes from input of a dome and film formation to extraction of a dome
Major applications
- Antireflection films
- Camera, spectacle and smartphone lenses
Specification outline
| Model | Type M (CES-3M) | Type S (CES-3S) | Type D (CES-3D) | |||||
|---|---|---|---|---|---|---|---|---|
| 1,100 | 1,350 | 2,000 | 900 | 1,050 | 900 | 1,100 | 1,350 | |
| Substrate dome | ⌀ 950 mm | ⌀ 1,200 mm | ⌀ 1,850 mm | ⌀ 718 mm | ⌀ 950 mm | ⌀ 718 mm | ⌀ 950 mm | ⌀ 1,200 mm |
| Film thickness gauge | Optical film thickness gauge and quartz type film thickness gauge (Six-point rotary sensor) | |||||||
| Evaporation source | EB x 2 | |||||||
| Assistance | RF ion source | |||||||
| Exhaust system | Roughing unit / diffusion pump / turbo-molecular pump | |||||||
| Option | Cryopump / water-repellent film formation mechanism | |||||||
Contact
We propose systems that meet
your requirements for functions
and applications.
Please feel free to contact us.
your requirements for functions
and applications.
Please feel free to contact us.
Sales Department
* Product specifications are subject to change for performance improvement without prior notice. For details, please contact our sales representatives.