Sputtering system for dielectric thin films
Enables stable deposition of dielectric thin films
- Application:
- Electron and electricity control
Our technologies cultivated over many years enable the stable deposition of dielectric thin films.
This system can be widely used in protective film applications using SiO2, SiN, and so on.
Major applications
- SAW filters / BAW filters / LEDs / Lasers / PCBs and so on
Specification outline
| Model | CSS-2 |
|---|---|
| Substrate dome | ⌀ 650 mm |
| Sputtering source | Magnetron sputtering source (⌀ 10”) x 3 |
| Sputtering power source | RF power source x 3 |
| Exhaust system | Anterior chamber: Roughing pump Film deposition chamber: Turbo-molecular pump x 1 + Supertrap |
Contact
We propose systems that meet
your requirements for functions
and applications.
Please feel free to contact us.
your requirements for functions
and applications.
Please feel free to contact us.
Sales Department
* Product specifications are subject to change for performance improvement without prior notice. For details, please contact our sales representatives.