Enables the stabilization of refractive indexes and uniformize refractive-index distribution, achieving the deposition of films with superior environmental characteristic resistance.
- Application:
- Components
Specification outline
Model | NIS-120 | NIS-175 | NIS-240 |
---|---|---|---|
Ion beam diameter (mm) | 120 | 175 | 240 |
Ion energy (eV) | 100~1000 | 100~1500 | 100~1500 |
Maximum ion current (mA) | 550 | 1,200 | 3,000 |
Maximum neutralizer current (mA) | 1,000 | 2,000 | 3,000 |
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* Product specifications are subject to change for performance improvement without prior notice. For details, please contact our sales representatives.