Enables the stabilization of refractive indexes and uniformize refractive-index distribution, achieving the deposition of films with superior environmental characteristic resistance.

Application:
Components

Specification outline

Model NIS-120 NIS-175 NIS-240
Ion beam diameter (mm) 120 175 240
Ion energy (eV) 100~1000 100~1500 100~1500
Maximum ion current (mA) 550 1,200 3,000
Maximum neutralizer current (mA) 1,000 2,000 3,000
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* Product specifications are subject to change for performance improvement without prior notice. For details, please contact our sales representatives.