Universal deposition system
Responding to a wide variety of film formation needs
- Application:
- OpticsColor control
This is a highly versatile deposition system that can respond to a wide variety of demands related to film formation, ranging from optical thin films to metallic films. The new model achieves further enhanced cost performance while maintaining its high level of performance and mass productivity. We offer a wealth of options to respond to various substrate applications such as spherical/divided dome and reversing pallet design, which can be chosen according to customers’ production purposes.
Features
- Employs a large-diameter high-output ion source to enable assisted film deposition
- Employs an optical thin film thickness gauge that achieves accurate control and a multipoint monitor replacement mechanism
- A turbo-molecular pump enables film deposition under an oil-free and clean environment
- A countermeasure is taken against particles generated during exhaustion and processes
- Equipped with an operation management system that can be used to grasp conditions on a real-time basis and analyze losses
- Employs an in-situ monitor that enables yield enhancement and a shortened adjustment time
Major applications
- Deposition of optical thin films
- Deposition of metallic films
- Also responds to a wide variety of applications
Specification outline
| Model | MIC-900 | MIC-1350 | MIC-1650 | MIC-1900 |
|---|---|---|---|---|
| Substrate dome | ⌀ 800 mm | ⌀ 1,200 mm | ⌀ 1,500 mm | ⌀ 1,700 mm |
| Film thickness gauge | Optical film thickness gauge and quartz type film thickness gauge (Six-point rotary sensor) | |||
| Evaporation source | EB x 2 | |||
| Assistance | RF ion source | |||
| Exhaust system | Roughing unit, turbo-molecular pump, and Meissner trap | |||
| Option | Reversal mechanism / planetary rotation mechanism / rotary and revolutionary mechanism / “OASYS” spectral characteristics adjustment assistance system | |||
Contact
We propose systems that meet
your requirements for functions
and applications.
Please feel free to contact us.
your requirements for functions
and applications.
Please feel free to contact us.
Sales Department
* Product specifications are subject to change for performance improvement without prior notice. For details, please contact our sales representatives.