Ensuring safety when operating the hearth rotation mechanism of electron guns manually

Case example

Fingers may be caught between a rotating hearth and the pole piece of an electron gun, resulting in injury, during replacement of the deposition agent.

Countermeasures

1. Before replacing the deposition agent and cleaning components around the deposition source, confirm that the hearth rotation mechanism has stopped completely.

2. To rotate the hearth using a manual switch, make sure to get far enough away from the hearth rotation mechanism before pressing the switch, in order to prevent fingers and sleeves from getting caught.

[Change of control]
As further safety measures for manual operation of the hearth rotation mechanism, the control system can also be changed.