Important Notices
Shutdown of vacuum thin film deposition systems
Oct 30, 2012
Case example
Systems may not be activated if the main breaker is left off for a long time.
Cause
The systems are equipped with components such as a sequencer and touch screen that maintain software using a backup battery. If the backup battery deteriorates, the software may disappear.
Countermeasures
Before turning off the main system breaker, please replace the backup battery.
If the system cannot be reactivated, please contact us.